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Programs for design of systems in particle optics
 Lencová, Bohumila ; Zlámal, J. ; Jánský, P.
The paper describes a number of programs used by us in the design of systems for surface studies and deposition that simulate the focusing, transport and deflection of charged particles. In deposition and implantation systems often quite intense beams of ions are used where the space charge effects become prohibitive. Therefore we have extended our 2D FEM program EOD, equipped with a Windows graphical interface, with an option to compute space charge limited beams.
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